Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series

Supplier: Entegris
ENTEPA18239MLC61C0EA 0 EUR
ENTEPA18239MLC61C0 ENTEPA18239M-61C02 ENTEPA18239MLC0603 ENTEPA72-40MB-0603 ENTEPA18239MLB0603 216-1574 ENTEA182-39MU-0215 216-1571 ENTEA18239MLB-0215 ENTEPA182-39M-0603 216-1632 216-1631 216-1697 216-1674
Wafer carriers, for 100 mm (4") wafer handling, 72/182 and 190 series
Wafer Handling Supplies Wafer Carriers
These 100 mm wafer carriers are designed for optimum performance in automated operations or for processing LCDs and other small devices.

72 series
Original linear wafer carrier
Wash openings
'H' bar equipment interface
Pins and holes on top rail
Both end walls have flanges that extend to the bottom of carrier

182 series
Open sidewall style with wrap-around wash slots
Protective side wall design guards against damage from operator contact

190 series
Optimum performance in centrifugal processing applications
Low contour, open flow sidewall style
'H' bar equipment interface
Pins and holes on top rail

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