Wafer carriers, for 125 mm (5") wafer handling,182 and 194 series

Supplier: Entegris
ENTEPA18250MB61C02EA 0 EUR
ENTEPA18250MB61C02 ENTEA182-50M-0215 216-1694 216-1572 ENTEA182-50MC-0215 ENTEPA182-50M-0603 ENTEA182-50MU-0215 216-1689
Wafer carriers, for 125 mm (5") wafer handling,182 and 194 series
Wafer Handling Supplies Wafer Carriers
These standard 125 mm wafer carriers are designed for optimum performance in automated equipment.

182 Series
Open sidewall style with wraparound wash slots
'H' bar equipment interface
26th slot for identification tag
Capacity: 25
D1 dimension: 14,53 mm
Pocket spacing: 4,76 mm
Pocket flat: 1,52 mm

194 Series
Open sidewall style
'H' bar equipment interface
Locating track notches at the center of the 13th pocket
Pins and holes on the top rail
Capacity: 25
D1 dimension: 14,53 mm
Pocket spacing: 4,76 mm
Pocket flat: 1,52 mm

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