Cartridge and disposable filters, Intercept®

Supplier: ENTEGRIS
IHAV01PLT IHAZ01PLT IHDZHPS1F
ENTEIHAV01PLTEA 0 EUR
ENTEIHAV01PLT ENTEIHAZ01PLT ENTEIHDZHPS1F
Cartridge and disposable filters, Intercept®
Filters Filter Cartridges
These filters provide superior filtration for critical dilute, aqueous and low neutral pH cleaning applications at advanced technology nodes. The clean, dual capture membrane improves process performance and reduces on-wafer defects. In addition to sieving particle capture which is always active, the non sieving retention mechanisms are also active and strongest in conditions where pH is <3 and no surfactant is present.

  • Hydrophilic membrane - no prewetting or flushing required
  • Rapid particle removal and microbubble control for faster bath startup/system qualification and increased yields

Membrane: Hydrophilic ultra-high molecular weight PE (UPE); Supports, core and sleeve: HDPE

Maximum operating temperature: 70 °C

Maximum forward differential pressure: 3,4 bar at 25 °C

Maximum reverse differential pressure: 2,1 bar at 25 °C
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