Pneumatically operated diaphragm valves, Integra®

Supplier: Entegris
INTEGRA™
ENTE202-128-01EA 0 EUR
ENTE202-128-01
Pneumatically operated diaphragm valves, Integra®
Valves Micro Valves
Available compliant to SEMI Standard F57-0312, the specification for polymer components used in ultrapure water and liquid chemical distribution systems. Valve design allows ultrapure water to continuously bypass the diaphragm, eliminating water stagnation and bacteria formation in the valve. Manually adjustable, integral needle valve provides precise control of bypass flow.

  • All wetted parts are PFA and PTFE
  • No external metal components
  • Unique top loading design allows for field service
  • Espy® sensor can be added for electronic monitoring of valve position

¹/₂" orifice, 2-way, adjustable bypass, position indication option.
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