Wafer transport carriers, 20X series

Supplier: ENTEGRIS INC
KA20280SH47C02 126-1793-47C02
ENTEKA20280SH47C02EA 0 EUR
ENTEKA20280SH47C02 ENTE126-1793-47C02
Wafer transport carriers, 20X series
Wafer Handling Supplies Wafer Carriers
High performance in a closed side wall configuration. Trends in wafer processing technology have mandated advancements in wafer carrier technology to support today's advanced semiconductor processing facilities. Wafer carriers designed for advanced wafer transport offer dramatic performance benefits over traditional low and mid-range wafer carriers.

  • Closed side wall style
  • Locating track notches at the center of the thirteenth pocket
  • Pins and holes on the top rail (unless noted)
  • D1 dimension: 25,4 mm
  • Pocket spacing: 6,4 mm
  • Pocket flat: 1,7 mm
  • For 25 wafers
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