HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade

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VWRC6686.2500EA 510 EUR
VWRC6686.2500
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
HMDS (1,1,1,3,3,3-hexamethyldisilazane)
Formula: (CH₃)₃SiNHSi(CH₃)₃
MW: 161,39 g/mol
Density: 0,78 g/cm³ (20 °C)
Storage Temperature: Ambient
MDL Number: MFCD00008259
CAS Number: 999-97-3
EINECS: 213-668-5
UN: 1992
ADR: 3 (6.1, 8),II

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Specification Test Results

Assay (GC) ≥ 99.5 %
Impurity profile (GC) Conforms
Colouration ≤ 10 APHA
Particle size(<gt/>0.50 μm)(/ml)(at filling) ≤ 200
Evaporation residue ≤ 10 ppm
Water ≤ 500 ppm
Cl (Chloride) ≤ 1000 ppb
Ag (Silver) ≤ 10 ppb
Al (Aluminium) ≤ 100 ppb
As (Arsenic) ≤ 10 ppb
Au (Gold) ≤ 20 ppb
B (Boron) ≤ 10 ppb
Ba (Barium) ≤ 20 ppb
Be (Beryllium) ≤ 10 ppb
Bi (Bismuth) ≤ 20 ppb
Ca (Calcium) ≤ 100 ppb
Cd (Cadmium) ≤ 10 ppb
Co (Cobalt) ≤ 10 ppb
Cr (Chromium) ≤ 10 ppb
Cu (Copper) ≤ 10 ppb
Fe (Iron) ≤ 50 ppb
Ga (Gallium) ≤ 10 ppb
In (Indium) ≤ 10 ppb
K (Potassium) ≤ 20 ppb
Li (Lithium) ≤ 10 ppb
Mg (Magnesium) ≤ 20 ppb
Mn (Manganese) ≤ 10 ppb
Mo (Molybdenum) ≤ 10 ppb
Na (Sodium) ≤ 100 ppb
Ni (Nickel) ≤ 10 ppb
Pb (Lead) ≤ 10 ppb
Pt (Platinum) ≤ 50 ppb
Sb (Antimony) ≤ 10 ppb
Sn (Tin) ≤ 20 ppb
Sr (Strontium) ≤ 10 ppb
Ti (Titanium) ≤ 20 ppb
Tl (Thallium) ≤ 10 ppb
V (Vanadium) ≤ 10 ppb
Zn (Zinc) ≤ 20 ppb
Zr (Zirconium) ≤ 20 ppb

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