HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
Supplier: VWR Chemicals
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Danger
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VWRC6686.2500EA
510
EUR
VWRC6686.2500
HMDS (1,1,1,3,3,3-hexamethyldisilazane) ≥99.5% VLSI, Electronic Grade
HMDS (1,1,1,3,3,3-hexamethyldisilazane)
Formula:
(CH₃)₃SiNHSi(CH₃)₃ MW: 161,39 g/mol Density: 0,78 g/cm³ (20 °C) Storage Temperature: Ambient |
MDL Number:
MFCD00008259 CAS Number: 999-97-3 EINECS: 213-668-5 UN: 1992 ADR: 3 (6.1, 8),II |
Specification Test Results
Assay (GC) | ≥ 99.5 % |
Impurity profile (GC) | Conforms |
Colouration | ≤ 10 APHA |
Particle size(<gt/>0.50 μm)(/ml)(at filling) | ≤ 200 |
Evaporation residue | ≤ 10 ppm |
Water | ≤ 500 ppm |
Cl (Chloride) | ≤ 1000 ppb |
Ag (Silver) | ≤ 10 ppb |
Al (Aluminium) | ≤ 100 ppb |
As (Arsenic) | ≤ 10 ppb |
Au (Gold) | ≤ 20 ppb |
B (Boron) | ≤ 10 ppb |
Ba (Barium) | ≤ 20 ppb |
Be (Beryllium) | ≤ 10 ppb |
Bi (Bismuth) | ≤ 20 ppb |
Ca (Calcium) | ≤ 100 ppb |
Cd (Cadmium) | ≤ 10 ppb |
Co (Cobalt) | ≤ 10 ppb |
Cr (Chromium) | ≤ 10 ppb |
Cu (Copper) | ≤ 10 ppb |
Fe (Iron) | ≤ 50 ppb |
Ga (Gallium) | ≤ 10 ppb |
In (Indium) | ≤ 10 ppb |
K (Potassium) | ≤ 20 ppb |
Li (Lithium) | ≤ 10 ppb |
Mg (Magnesium) | ≤ 20 ppb |
Mn (Manganese) | ≤ 10 ppb |
Mo (Molybdenum) | ≤ 10 ppb |
Na (Sodium) | ≤ 100 ppb |
Ni (Nickel) | ≤ 10 ppb |
Pb (Lead) | ≤ 10 ppb |
Pt (Platinum) | ≤ 50 ppb |
Sb (Antimony) | ≤ 10 ppb |
Sn (Tin) | ≤ 20 ppb |
Sr (Strontium) | ≤ 10 ppb |
Ti (Titanium) | ≤ 20 ppb |
Tl (Thallium) | ≤ 10 ppb |
V (Vanadium) | ≤ 10 ppb |
Zn (Zinc) | ≤ 20 ppb |
Zr (Zirconium) | ≤ 20 ppb |
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