InVue® NT6520 Integrated Flow Controllers

Supplier: Entegris
InVue® NT6520
ENTE6520T7K6B12KP7EA 0 EUR
ENTE6520T7K6B12KP7 ENTE6520T8F6B12KP7 ENTE6520T7F4B12KP7 ENTE6520T8F6B12AP7
InVue® NT6520 Integrated Flow Controllers
Flow Controllers
Offers precise point-of-use chemical flow control and is designed for point-of-use blending and dispense applications requiring medium to high flow rates (2,5 to 40 L/min).

  • Most accurate in bubble prone media vs. other commonly used technologies
  • Integral pressure transducer for simultaneous dual output - flow and pressure
  • Compact footprint for space savings and easy installation
  • High repeatability for superior process control

The InVue Integrated Flow Controller, NT6520 (2,5 to 40 L/min) combines our differential pressure based flowmeter and leading-edge control valve technology to create a closed-loop flow controller ideal for: Critical dispense applications, Chemical spiking and blending, On-demand chemical mixing and Higher flow applications such as bulk delivery or tool liquid dispense.

Materials of construction:
Wetted parts: Body, valve diaphragms: PTFE
Sensor interface: CTFE or PFA
Primary O-ring: Perfrez® PXC Ultra
Nonwetted parts: Polypropylene, PVDF, Viton®, polyurethane, and nylon
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