GateKeeper® GPU 10M 8 and 12R Gas Purifiers

Supplier: ENTEGRIS INC
GPUS10MFHX08R2 GPUS10MFWX12R0 GPUS10MFWX12R2
ENTEGPUS10MFHX08R2EA 0 EUR
ENTEGPUS10MFHX08R2 ENTEGPUS10MFWX12R0 ENTEGPUS10MFWX12R2
GateKeeper® GPU 10M 8 and 12R Gas Purifiers
Filters Gas Filters
GateKeeper® GPU gas purifiers were designed to improve purity consistency, lifetime, and final purity in microelectronics applications where high-purity gas is critical. Leveraging our expertise in material science, we have developed a new generation of WX and HX gas purification products that deliver unsurpassed value and performance.

  • Purity control below part-per-billion (ppb) levels
  • Low pressure drop through the purifier
  • Cost effective
  • Regenerable - eliminates disposal issues and costs
  • Long lifetime - improves cost of ownership
  • Safe and simple to use
  • Ambient temperature purification - no heat or power required to operate
  • Insensitive to orientation (horizontal/vertical)

Gases purified:
WX model - CDA, O₂, CO₂, N₂, Ar, He, Ne, Kr, Xe, H₂, D₂, NH₃, AsH₃, PH₃, GeH₄, SiH₄, N₂O, NO, CF₄, C₂H₂, (CH₃)2NH (DMA), (CH₃)2N₂H₂ (DMHz)
HX model - H₂, D₂, N₂, Ar, He, Ne, Kr, Xe, H₂/N₂, H₂/Noble gases

Applications: Semiconductor, data storage, flat panel display, LED, solar

Certifikace: Manufactured in an ISO® 9001:2015 facility. Designed in accordance with ASME®.
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