Sulphuric acid ≥96%, CMOS for microelectronic, J.T.Baker®

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9684-03EA 141 EUR
9684-03 9684-05
Sulphuric acid ≥96%, CMOS for microelectronic, J.T.Baker®
Sulphuric acid
Formula: H₂SO₄
Boiling Pt: ∼335 °C (1013 hPa)
Melting Pt: 3 °C
Density: 1.84 g/cm³ (20 °C)
Storage Temperature: Ambient
MDL Number: MFCD00064589
CAS Number: 7664-93-9
EINECS: 231-639-5
UN: 1830
ADR: 8,II
Merck Index: 14,08974

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Specification Test Results

For Microelectronic Use 95.0 - 97.0 %
Recommended Storage Conditions: 15° - 100°F = 10
Assay (H₂SO₄) 95.0 - 97.0 %
Color (APHA) ≤10
Residue after Ignition ≤2 ppm
Chloride (Cl) ≤0.1 ppm
Nitrate (NO₃) ≤0.2 ppm
Phosphate (PO₄) ≤0.3 ppm
Trace Impurities - Aluminum (Al) ≤50.0 ppb
Arsenic and Antimony (as As) ≤5.0 ppb
Trace Impurities - Barium (Ba) ≤10.0 ppb
Trace Impurities - Beryllium (Be) ≤10.0 ppb
Trace Impurities - Bismuth (Bi) ≤20.0 ppb
Trace Impurities - Boron (B) ≤10.0 ppb
Trace Impurities - Cadmium (Cd) ≤10.0 ppb
Trace Impurities - Calcium (Ca) ≤50.0 ppb
Trace Impurities - Chromium (Cr) ≤50 ppb
Trace Impurities - Cobalt (Co) ≤10.0 ppb
Trace Impurities - Copper (Cu) ≤10.0 ppb
Trace Impurities - Gallium (Ga) ≤10.0 ppb
Trace Impurities - Germanium (Ge) ≤10.0 ppb
Trace Impurities - Gold (Au) ≤20 ppb
Heavy Metals (as Pb) ≤200.0 ppb
Trace Impurities - Iron (Fe) ≤100.0 ppb
Trace Impurities - Lead (Pb) ≤20.0 ppb
Trace Impurities - Lithium (Li) ≤10.0 ppb
Trace Impurities - Magnesium (Mg) ≤50.0 ppb
Trace Impurities - Manganese (Mn) ≤10.0 ppb
Trace Impurities - Mercury (Hg) ≤5.0 ppb
Trace Impurities - Molybdenum (Mo) ≤10.0 ppb
Trace Impurities - Nickel (Ni) ≤10.0 ppb
Trace Impurities - Niobium (Nb) ≤10.0 ppb
Trace Impurities - Potassium (K) ≤50 ppb
Trace Impurities - Silicon (Si) ≤50 ppb
Trace Impurities - Silver (Ag) ≤10.0 ppb
Trace Impurities - Sodium (Na) ≤100.0 ppb
Trace Impurities - Strontium (Sr) ≤10.0 ppb
Trace Impurities - Tantalum (Ta) ≤10.0 ppb
Trace Impurities - Thallium (Tl) ≤20.0 ppb
Trace Impurities - Tin (Sn) ≤50 ppb
Trace Impurities - Titanium (Ti) ≤10.0 ppb
Trace Impurities - Vanadium (V) ≤10.0 ppb
Trace Impurities - Zinc (Zn) ≤50 ppb
Trace Impurities - Zirconium (Zr) ≤10.0 ppb
Particle Count - 0.5 µm and greater ≤60 par/ml
Particle Count - 1.0 µm and greater ≤10 par/ml

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